A4: Process control in micro atmospheric pressure RF plasma jets by voltage waveform tailoring and customised boundary surfaces

Principal Investigators: J. Schulze, T. Mussenbrock

Team

Mussenbrock, Thomas (Principal Investigator)

Schulze, Julian (Principal Investigator)

Bischoff, Lena (Master)

Vass, Mate (PhD)

Schulenberg, David (PhD)

Description

Based on experiments and simulations, the species transport in the COST reference plasma jet will be studied from the gas inlet through the active plasma region into the effluent in the presence of Voltage Waveform Tailoring (VWT) and customised boundary surfaces (materials + topology). The buildup of different neutral species along the direction of the gas flow will be quantified and understood as a basis for advanced plasma source design. Moreover, the plasma jet design will be modified by introducing a mesh into one of the electrodes and closing the original nozzle to make use of the unique features of VWT and structured electrodes to enhance the flux of selected neutral species into the effluent through the gridded electrode. Finally, the unique potential of VWT to tailor the Electron Energy Probability Function (EEPF) in combination with the new plasma source design will be used to enhance the synthesis of NH3 via cold non-equilibrium plasma catalysis by selectively exciting and dissociating nitrogen by electron impact.

Publications

• Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
  A. Derzsi, M. Vass, R. Masheyeva, B. Horvath, Z. Donko, P. Hartmann
  Plasma Sourc. Sci. Technol. 33 025005 (2024)
  
• Mode Transition Induced by Gas Heating Along the Discharge Channel in Capacitively Coupled Atmospheric Pressure Micro Plasma Jets
  D. Schulenberg, M. Vass, M. Klich, Z. Donko, J. Klotz, N. Bibinov, T. Mussenbrock, J. Schulze
  Plasma Chemistry and Plasma Processing (2024)
  Repository: https://rdpcidat.rub.de/node/726
• A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O2 mixtures
  M. Vass, D. Schulenberg, Z. Donko, I. Korolov, P. Hartmann, J. Schulze, T. Mussenbrock
  Plasma Sourc. Sci. Technol. 33 015012 (2024)
  
• Scanning drift tube measurements and kinetic studies of electron transport in CO
  S. Dujko, D. Bosnjakovic, M. Vass, P. Hartmann, I. Korolov, N. R. Pinhao, D. Loffhagen, Z. Donko
  Plasma Sourc. Sci. Technol. 32 025014 (2023)
  
• Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
  C. W. Park, B. Horvath, A. Derzsi, J. Schulze, J. H. Kim, Z. Donko, H. C. Lee
  Plasma Sourc. Sci. Technol. 32 115003 (2023)
  
• Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge
  Z. Donko, P. Hartmann, I. Korolov, D. Schulenberg, S. Rohr, S. Rauf, J. Schulze
  Plasma Sourc. Sci. Technol. 32 065002 (2023)
  
• Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges
  J. Y. Sun, J. Schulze, F. F. Ma, Q. Z. Zhang, Y. N. Wang
  Physics of Plasmas 30, 120703 (2023)
  
• The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges
  C. Neuroth, Z. Mujahid, B. Berger, C. Oberste-Beulmann, T. Oppotsch, Q.-Z. Zhang, M. Muhler, T. Mussenbrock, I. Korolov, J. Schulze
  Plasma Sources Sci. Technol. 32, 105019 (2023)
  Repository: https://rdpcidat.rub.de/node/739
• Local enhancement of electron heating and neutral species generation in radio-frequency micro-atmospheric pressure plasma jets: the effects of structured electrode topologies
  Y. Liu, M. Vass, G. Hübner, D. Schulenberg, T. Hemke, L. Bischoff, S. Chur, D. Steuer, J. Golda, M. Böke
  Plasma Sources Sci. Technol. 32 025012 (2023)
  
• Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis
  M. Vass, L. Wang, S. Wilczek, T. Lafleur, R. P. Brinkmann, Z. Donko, J. Schulze
  Plasma Sourc. Sci. Technol. 31 115004 (2022)
  
• On the validity of the classical plasma conductivity in capacitive RF discharges
  L. Wang, M. Vass, T. Lafleur, Z. Donko, Y. H. Song, J. Schulze
  Plasma Sourc. Sci. Technol. 31 105013 (2022)
  
• Electron power absorption in capacitively coupled neon–oxygen plasmas: a comparison of experimental and computational results
  A. Derzsi, P. Hartmann, M. Vass, B. Horvath, M. Gyulai, I. Korolov, J. Schulze, Z. Donko
  Plasma Sourc. Sci. Technol. 31 085009 (2022)
  
• Evolution of the bulk electric field in capacitively coupled argon plasmas at intermediate pressures
  M. Vass, S. Wilczek, A. Derzsi, B. Horvath, P. Hartmann, Z. Donko
  Plasma Sourc. Sci. Technol. 31 045017 (2022)
  
• Revisiting the numerical stability/accuracy conditions of explicit PIC/MCC simulations of low-temperature gas discharges
  M. Vass, P. Palla, P. Hartmann
  Plasma Sourc. Sci. Technol. 31 064001 (2022)
  
• The effects of the driving frequencies on micro atmospheric pressure He/N₂ plasma jets driven by tailored voltage waveforms
  G. Hübner, L. Bischoff, I. Korolov, Z. Donkó, M. Leimkühler, Y. Liu, M. Böke, V. Schulz-von der Gathen, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 55, 095204 (2022)
  
• Electron power absorption in micro atmospheric pressure plasma jets driven by tailored voltage waveforms in He/N₂
  M. Vass, S. Wilczek, J. Schulze, Z. Donko
  Plasma Sources Sci. Technol. 30, 105010 (2021)
  
• Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N₂mixtures
  I. Korolov, Z. Donko, G. Hübner, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 30, 095013 (2021)
  
• A zero-dimensional model of atmospheric-pressure plasma jet in binary and ternary mixtures of oxygen and nitrogen with helium background
  Y. He, P. Preissing, D. Steuer, M. Klich, V. Schulz-von der Gathen, M. Böke, I. Korolov, J. Schulze, V. Guerra, R. P. Brinkmann, E. Kemaneci
  Plasma Sources Sci. Technol. 30, 105017 (2021)
  
• Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O₂: A fluid dynamics approach
  Y Liu, I Korolov, T Hemke, L Bischoff, G Hübner, J Schulze, T Mussenbrock
  J. Phys. D 54 (27), 275204 (2021)
  
• 2d spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent
  D. Steuer, I. Korolov, S. Chur, J. Schulze, V. Schulz-von der Gathen, J. Golda, M. Böke
  J. Phys. D: Appl. Phys. 54, 355204 (2021)
  
• Electron transport parameters in CO₂: a comparison of two experimental systems and measured data
  M. Vass, E. Egüz, A. Chachereau, P. Hartmann, I. Korolov, A. Hösl, D. Bošnjaković, S. Dujko, Z. Donkó, C. Franck
  J. Phys. D: Appl. Phys. 54 035202 (2021)
  
• Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations
  Q.Z. Zhang, R.T. Nugyen-Smith, F. Beckfeld, Y. Liu, T. Mussenbrock, P. Awakowicz, J. Schulze
  Plasma Sources Sci. Technol. 30, 075017 (2021)
  
• Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures
  I. Korolov, D. Steuer, L. Bischoff, G. Hübner, Y. Liu, V. Schulz-von der Gathen, M. Böke, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 54, 125203 (2021)
  
• Micro atmospheric pressure plasma jets excited in He/O₂ by voltage waveform tailoring: A study based on a numerical hybrid model and experiments
  Y. Liu, I. Korolov, J. Trieschmann, D. Steuer, V. Schulz-von der Gathen, M. Böke, L. Bischoff, G. Hübner, J. Schulze, T. Mussenbrock
  Plasma Source. Sci. Technol. 30, 064001 (2021)
  
• 3-dimensional density distributions of NO in the effluent of the COST Reference MicroplasmaJet operated in He/N₂/O₂ admixture
  P. Preissing, I. Korolov, J. Schulze, V. Schulz-von der Gathen, M. Böke
  Plasma Sources Sci. Technol. 29, 125001 (2020)
  
• Electron swarms parameters in C₂H₂, C₂H₄ and C₂H₆: measurements and kinetic calculations
  Z. Donkó, P. Hartmann, I. Korolov, V. Jeges, D. Bošnjaković, S. Dujko
  Plasma Sources Sci. Technol. 29, 045009 (2020)
  
• Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N₂
  I. Korolov, M. Leimkühler, M. Böke, J. Schulze, Z. Donkó, T. Lafleur, S. Wilczek, R.P. Brinkmann V. Schulz-von der Gathen, L. Bischoff, G. Hübner, P. Hartmann, T. Gans, Y. Liu, T. Mussenbrock, J. Schulze
  J. Phys. D: Appl. Phys. 53 (2020) 185201
  
• Experimental observation and simulation of the equilibration of electron swarms in a scanning drift tube
  Z. Donkó, P. Hartmann, I. Korolov, V. Jeges, D. Bošnjaković, S. Dujkovic
  Plasma Sources Sci. Technol. 28, 095007 (2019)
  
• Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring
  I. Korolov, Z. Donkó, G. Hübner, L. Bischoff, P. Hartmann, T. Gans, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 28, 094001 (2019)
  
• Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring
  A. Gibson, Z. Donkó, L. Alelyani, L. Bischoff, G. Hübner, J. Bredin, S. Doyle, I. Korolov, K. Niemo, T. Mussenbrock, P. Hartmann, J. Dedrick, J. Schulze, T. Gans, D. O'Connell
  Plasma Sources Sci. Technol. 28, 01LT01 (2019)
  
• Spatio temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
  J. Schulze, Z. Donkó, T. Lafleur, S. Wilczek, R.P. Brinkmann
  Plasma Sources Sci. Technol. 27, 055010 (2018)
  
• Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N₂ mixture
  L. Bischoff, G. Hübner, I. Korolov, Z. Donkó, P. Hartmann, T. Gans, J. Held, V. Schulz-von der Gathen, Y. Liu, T. Mussenbrock, J. Schulze
  Plasma Sources Sci. Technol. 27 (2018)125009
  

Thesis

• Lena Bischoff, Bachelor thesis - 08/2018
  Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Sauerstoffbeimischung
• Gerrit Hübner, Bachelor thesis - 08/2018
  Optische Emissionsspektroskopie an einem RF kapaazitiv gekoppelten AP Plasma Jet unter Variation der Stickstoffbeimischung
• Lena Bischoff, Master thesis - 03/2021
  Investigation of the effects of customized electrodes on capacitively coupled radio frequency microplasma jets using emission spectroscopy and laser d
• Mate Vass, PhD thesis - ongoing
  
• David Schulenberg, PhD thesis - ongoing
  
• Bernhard Rogg, Bachelor thesis - 01/2022
  Numerical simulation of plasma fluid flow in the exit channel of a COST micro atmospheric pressure plasma jet
• Stefan Rohr, Bachelor thesis - 04/2022
  Ortsaufgelöste Charakterisierung eines sammetrischen, kapazitiven gekoppelten Plasmas mittels Tunable Diode Laser Absorption Spectroscopy
• Constantin Neuroth, Bachelor thesis - 09/2022
  Study of the effects of metal catalyst loading and conductivity on plasma danamics in a patterned dielectric barrier discharge
• Ahmad Al Hamdan, Bachelor thesis - 03/2023
  Study of VOC removal in a patterned dielectric barrier discharge
• Niklas Simon Friedrichs, Master thesis - 05/2023
  Control of distribution function of different species by voltage waveforms tailoring in reactive CCPs
• Lukas Leonhard Vogelhuber, Master thesis - 05/2023
  Modellierung und Simulation von Transportprozessen im Hochfrequenz-Mikro-Atmosphärendruck-Plasmajet
• Samuel Jonas Giesekus, Master thesis - ongoing
  Ion energy control by Voltage Waveform Tailoring in inductively coupled plasmas with substrate bias

Further reading